This chapter shall govern the design, installation, operation and maintenance of semiconductor fabrication facilities and comparable research and development facilities classified as Group H-5 occupancies, and the storage, handling and use of hazardous materials therein.
The requirements set forth in this chapter are requirements specific only to Group H-5 and shall be applied as exceptions or additions to applicable requirements set forth elsewhere in this code.
Where a material poses multiple hazards, all hazards shall be addressed in accordance with FC5001.1.
Semiconductor fabrication facilities and comparable research and development facilities classified as Group H-5 occupancies shall be designed, installed, operated and maintained in accordance with this chapter. Such facilities and hazardous materials shall additionally comply with the requirements of the construction codes, including the Building Code.
The following terms shall, for the purposes of this chapter and as used elsewhere in this code, have the meanings set forth in FC202.
CONTINUOUS GAS DETECTION SYSTEM.
EMERGENCY CONTROL STATION.
FABRICATION AREA.
HAZARDOUS PRODUCTION MATERIAL (HPM).
HPM FLAMMABLE LIQUID.
HPM ROOM.
PASS-THROUGH.
SEMICONDUCTOR FABRICATION FACILITY.
SERVICE CORRIDOR.
TOOL.
WORKSTATION.
CONTINUOUS GAS DETECTION SYSTEM.
EMERGENCY CONTROL STATION.
FABRICATION AREA.
HAZARDOUS PRODUCTION MATERIAL (HPM).
HPM FLAMMABLE LIQUID.
HPM ROOM.
PASS-THROUGH.
SEMICONDUCTOR FABRICATION FACILITY.
SERVICE CORRIDOR.
TOOL.
WORKSTATION.
The emergency control station shall be located on the premises at an approved location outside of the fabrication area.
Trained personnel shall continuously staff the emergency control station.
The emergency control station shall monitor signals from emergency equipment and alarm and detection systems, including the following systems, whether required by this code or the construction codes or voluntarily installed:
- Sprinkler system alarm and monitoring systems.
- Manual fire alarm systems.
- Emergency alarm systems.
- Continuous-gas detection systems.
- Smoke detection systems.
- Emergency power systems.
- Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by FC2705.2.3.4.
- Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by FC2705.2.3.4.
Devices, equipment and systems including, containers, piping, tubing, valves and fittings shall comply with the requirements of this section, FC5003.2, and other applicable provisions of this code, and the construction codes, including the Building Code and the Mechanical Code.
The requirements set forth in FC5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids. Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilated enclosure if the material is a gas, or an approved method of drainage or containment is provided for connections if the material is a liquid.
Semiconductor fabrication facilities shall be designed and installed in accordance with FC 2703.3.1 through 2703.3.9.
Design, installation and location of fabrication areas shall comply with the requirements of the construction codes, including the Building Code.
Pass-throughs in exit access corridors shall be constructed in accordance with the construction codes, including the Building Code.
Liquid storage rooms shall comply with the requirements of FC Chapter 57 and the construction codes, including the Building Code.
HPM rooms shall comply with the requirements of the construction codes, including the Building Code.
Gas cabinets shall comply with the requirements of FC5003.8.6.
Exhausted enclosures shall comply with the requirements of FC5003.8.5.
Gas rooms shall comply with the requirements of FC5003.8.4.
Cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids in containers or in amounts greater than 1/2 gallon (2 L) shall comply with FC2705.2.3.4.
An emergency preparedness plan shall be prepared in accordance with FC Chapter 4.
Maintenance of devices, equipment, systems and processes shall comply with the requirements of FC5003.2.6.
Electrical wiring and equipment in HPM facilities shall comply with the requirements of FC 2703.7.1 through 2703.7.3.
Electrical wiring and equipment in fabrication areas shall comply with the requirements of the Building Code and Electrical Code.
Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with the requirements of the Electrical Code for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with FC2703.14.
Exception:
Class I, Division 2 hazardous electrical equipment is not required when the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
Electrical wiring and equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with the requirements of the Electrical Code.
A sprinkler system shall be provided in accordance with FC 2703.10.1 through 2703.10.5, FC Chapter 9 and the Building Code.
The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment.
A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be located not more than 2 feet (610 mm) from the point of the duct connection or the connection to the plenum. When necessary to prevent corrosion, the sprinkler head and connecting piping in the duct shall be coated with approved or listed corrosion-resistant materials. The sprinkler head shall be accessible for periodic inspection in accordance with FC Chapter 9.
Exceptions:
- Alternative fire extinguishing systems shall be allowed where approved. Activation of such systems shall deactivate the related processing equipment.
- Process equipment that operates at temperatures exceeding 932°F (500°C) and has automatic shutdown capabilities that will interrupt HPM flow for hazardous materials.
- Exhaust ducts 10 inches (254 mm) or less in diameter from flammable gas storage cabinets that are part of a workstation.
- Ducts listed or approved for use without internal sprinkler protection.
Where the horizontal surface of a combustible tool is obstructed from ceiling sprinkler discharge, sprinkler protection that covers the horizontal surface of the tool shall be provided.
Exceptions:
- A gaseous fire extinguishing local surface application system shall be allowed as an alternative to sprinklers when approved. Gaseous fire extinguishing systems shall be actuated by infrared (IR) or ultraviolet/infrared (UVIR) optical detectors.
- Tools constructed of materials that are listed as Class 1 or Class 2 in accordance with UL 2360 or approved for use without internal fire extinguishing system protection.
A sprinkler system shall be provided in gas cabinets and exhausted enclosures containing HPM compressed gases.
Exception:
Gas cabinets located in a HPM room other than those cabinets containing pyrophoric gases.
A sprinkler system shall be provided in exhaust ducts conveying gases, vapors, fumes, mists or dusts generated from HPM in accordance with this section and the Mechanical Code and the Building Code.
A sprinkler system shall be provided in metallic and noncombustible nonmetallic exhaust ducts when the following conditions apply:
- The largest cross-sectional diameter is equal to or greater than 10 inches (254 mm).
- The ducts are within the building.
- The ducts are conveying flammable gases, vapors or fumes.
A sprinkler system shall be provided in combustible nonmetallic exhaust ducts when the largest cross-sectional diameter of the duct is equal to or greater than 10 inches (254 mm).
Exceptions:
- Ducts listed or approved for applications without sprinkler system protection.
- Ducts not more than 12 feet (3658 mm) in length installed below ceiling level.
Fire extinguishing system protection for exhaust connections and plenums of combustible workstations shall comply with the requirements of FC2703.10.1.1.
Sprinkler systems installed in exhaust duct systems shall be hydraulically designed to provide 1/2 gallon per minute (gpm) (1.9 L/min) over an area derived by multiplying the distance between the sprinklers in a horizontal duct by the width of the duct. Minimum discharge shall be 20 gpm (76 L/min) per sprinkler from the five hydraulically most remote sprinklers.
Sprinkler heads shall be installed at 12-foot (3658 mm) intervals in horizontal ducts and at changes in direction. In vertical runs, sprinkler heads shall be installed at the top and at alternate floor levels.
A separate indicating control valve shall be provided for sprinkler heads installed in exhaust ducts.
Drainage shall be provided to remove sprinkler water discharged in exhaust ducts.
Where corrosive atmospheres exist, exhaust duct sprinkler heads and pipe fittings shall be manufactured of corrosion-resistant materials or coated with approved materials.
Sprinkler heads in exhaust ducts shall be accessible for inspection and maintenance and shall be inspected and maintained on not less than an annual basis.
Sprinkler systems shall be electrically supervised and provided with alarms in accordance with the construction codes, including the Building Code. Sprinkler system alarm and supervisory signals shall be transmitted to the emergency control station.
A manual fire alarm system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with the construction codes, including the Building Code.
Emergency alarm systems shall be provided in accordance with this section, FC5004.9 and FC5005.4.4. The maximum allowable quantity per control area provisions of FC5004.1 shall not apply to emergency alarm systems required for HPM.
Emergency alarm systems shall be provided in the areas indicated in FC 2703.12.1.1 through 2703.12.1.3.
An approved emergency alarm system shall be provided in service corridors, with at least one alarm device in the service corridor.
Emergency alarms for exit access corridors and exit enclosures shall comply with the requirements of FC5005.4.4.
Emergency alarms for liquid storage rooms, HPM rooms and gas rooms shall comply with the requirements of FC5004.9.
An approved emergency telephone system, local alarm manual pull stations, or other approved alarm-initiating devices are allowed to be used as emergency alarm-initiating devices.
Activation of the emergency alarm system shall sound a local alarm and transmit a signal to the emergency control station.
A continuous gas detection system shall be provided for HPM gases when the physiological warning properties of the gas are at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with the construction codes, including the Building Code.
Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with the requirements of this section, other applicable provisions of this code, the construction codes, including the Building Code and the Mechanical Code.
Exhaust ventilation systems shall be provided in the following locations in accordance with this section and the construction codes, including the Building Code:
- Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the requirements of the construction codes, including the Building Code. Additional manual control switches shall be provided as may be required by the commissioner.
- Workstations: A ventilation system shall be provided to capture and exhaust fumes and vapors at workstations.
- Liquid storage rooms: Exhaust ventilation for liquid storage rooms shall comply with the requirements of FC5004.3.1 and the construction codes, including the Building Code and Mechanical Code.
- HPM rooms: Exhaust ventilation for HPM rooms shall comply with the requirements of FC5004.3.1 and the construction codes, including the Building Code and the Mechanical Code.
- Gas cabinets: Exhaust ventilation for gas cabinets shall comply with the requirements of FC5003.8.6.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.
- Exhausted enclosures: Exhaust ventilation for exhausted enclosures shall comply with the requirements of FC5003.8.5.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.
- Gas rooms: Exhaust ventilation for gas rooms shall comply with the requirements of FC5003.8.4.2. Exhaust ventilation for gas rooms containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.
- Cabinets containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust ventilation for cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids shall be as required in FC2705.2.3.4.
Treatment systems for highly toxic and toxic gases shall comply with the requirements of FC Chapter 60.
An emergency power system shall be provided in Group H-5 occupancies where required by the construction codes, including the Building Code. The emergency power system shall be designed to supply power automatically to required electrical systems when the normal supply system is interrupted.
Emergency power shall be provided for electrically operated equipment and connected control circuits as required by Chapter 4 of the Building Code or this code.
Sub-atmospheric pressure gas systems (SAGS) shall be designed, installed, operated and maintained in accordance with NFPA 318.
Hazardous materials shall be stored in semiconductor fabrication facilities in accordance with this section and the provisions of other applicable chapters of this code.
Storage of HPM in fabrication areas shall be within approved or listed storage cabinets, gas cabinets or within a workstation as follows:
- Flammable and combustible liquid storage cabinets shall comply with the requirements of FC Chapter 57.
- Hazardous materials storage cabinets shall comply with the requirements of FC5003.8.7.
- Gas cabinets shall comply with the requirements of FC5003.8.6. Gas cabinets for highly toxic or toxic gases shall additionally comply with the requirements of FC6004.1.2.
- Exhausted enclosures shall comply with FC5003.8.5. Exhausted enclosures for highly toxic or toxic gases shall also comply with FC6004.1.3.
- Workstations shall comply with the requirements of FC2705.2.3.
The aggregate quantities of hazardous materials stored, handled and used in a single fabrication area shall be limited as specified in this section.
Exception:
Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by FC 5003.1.1, 5704.3.4 and 5704.3.5.
The maximum quantities of hazardous materials stored in a single fabrication area shall not exceed the quantities set forth in FC Table 2704.2.2.1.
For SI: 1 pound per square foot = 4.882 kg/m2, 1 gallon per square foot = 0.025 L/m2, 1 cubic foot = 0.02832 m3.
|
HAZARD CATEGORY
|
SOLIDS
(pounds/square foot) |
LIQUIDS
(gallons/square foot) |
GAS
(SCF/square foot) |
|
PHYSICAL-HAZARD MATERIALS
|
|||
| Combustible dust |
Note b
|
Not Applicable
|
Not Applicable
|
| Combustible fiber |
Not Applicable
|
Not Applicable
|
|
|
Loose
|
Note b
|
||
|
Baled
|
Notes b, c
|
||
| Combustible liquid |
Not Applicable
|
Not Applicable
|
|
|
Class II
|
0.01
|
||
|
Class IIIA
|
0.02
|
||
|
Class IIIB
|
Not Limited
|
||
|
Combination Class I, II and IIIA
|
0.04
|
||
| Cryogenic gas |
Not Applicable
|
Not Applicable
|
|
|
Flammable
|
Note d
|
||
|
Oxidizing
|
1.25
|
||
| Explosives |
Note b
|
Note b
|
Note b
|
| Flammable gas |
Not Applicable
|
Not Applicable
|
|
|
Gaseous
|
Note d
|
||
|
Liquefied
|
Note d
|
||
| Flammable liquid |
Not Applicable
|
Not Applicable
|
|
|
Class IA
|
0.0025
|
||
|
Class IB
|
0.025
|
||
|
Class IC
|
0.025
|
||
|
Combination Class IA, IB and IC
|
0.025
|
||
|
Combination Class I, II and IIIA
|
0.04
|
||
| Flammable solid |
0.001
|
Not Applicable
|
Not Applicable
|
| Organic peroxide |
Not Applicable
|
Not Applicable
|
|
|
Note b
|
|||
|
Class I
|
Note b
|
||
|
Class II
|
0.025
|
||
|
Class III
|
0.1
|
||
|
Class IV
|
Not Limited
|
||
|
Class V
|
Not Limited
|
||
| Oxidizing gas |
Not Applicable
|
Not Applicable
|
|
|
Gaseous
|
1.25
|
||
|
Liquefied
|
1.25
|
||
|
Combination of Gaseous and Liquefied
|
1.25
|
||
| Oxidizer |
Not Applicable
|
||
|
Class 4
|
Note b
|
Note b
|
|
|
Class 3
|
0.003
|
0.03
|
|
|
Class 2
|
0.003
|
0.03
|
|
|
Class 1
|
0.003
|
0.03
|
|
|
Combination oxidizer Class 1, 2, 3
|
0.003
|
0.03
|
|
| Pyrophoric |
Note b
|
0.00125
|
Notes d
and e
|
| Unstable reactive | |||
|
Class 4
|
Note b
|
Note b
|
Note b
|
|
Class 3
|
0.025
|
0.0025
|
Note b
|
|
Class 2
|
0.1
|
0.01
|
Note b
|
|
Class 1
|
Not Limited
|
Not Limited
|
Not Limited
|
| Water reactive |
Not Applicable
|
||
|
Class 3
|
Note b
|
0.00125
|
|
|
Class 2
|
0.25
|
0.025
|
|
|
Class 1
|
Not Limited
|
Not Limited
|
|
|
HEALTH-HAZARD MATERIALS
|
|||
| Corrosives |
Not Limited
|
Not Limited
|
Not Limited
|
| Highly toxics |
Not Limited
|
Not Limited
|
Note d
|
| Toxics |
Not Limited
|
Not Limited
|
Note d
|
- Hazardous materials within piping shall not be included in the calculated quantities.
- Quantity of hazardous materials in a single fabrication area shall not exceed the maximum allowable quantities per control area in FC Tables 5003.1.1(1) and 5003.1.1(2).
- Densely packed baled cotton that complies with the packing requirements of ISO 8115 shall not be included in this material class.
- The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed 9,000 SCF.
- The aggregate quantity of pyrophoric gases in the building shall not exceed the amounts set forth in FC Table 5003.8.2.
The indoor storage of hazardous materials outside of fabrication areas shall be in accordance with FC 2704.3.1 through 2704.3.3.
The indoor storage of HPM in quantities greater than those listed in FC 5003.1.1 and 5704.3.4 shall be in a room complying with the requirements of the construction codes, including the Building Code, and this code for a liquid storage room, HPM room or gas room as appropriate for the materials stored.
The indoor storage of other hazardous materials shall comply with the requirements of FC 5001, 5003 and 5004 and other applicable provisions of this code.
Incompatible hazardous materials in storage shall be separated from each other in accordance with FC5003.9.8.
Hazardous materials shall be handled and used in accordance with this section, FC2703 and other applicable provisions of this code.
The use of hazardous materials in fabrication areas shall be in accordance with FC 2705.2.1 through 2705.2.3.4.
Hazardous production materials in use in fabrication areas shall be within approved or listed gas cabinets, exhausted enclosures or within a workstation, in accordance with FC Chapter 50.
The aggregate quantities of hazardous materials in a single fabrication area shall comply with the requirements of FC2704.2.2, and FC Table 2704.2.2.1. The quantity of HPM in use at a workstation shall not exceed the quantities listed in FC Table 2705.2.2.
For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L.
|
HPM CLASSIFICATION
|
STATE
|
MAXIMUM QUANTITY
|
| Flammable, highly toxic, pyrophoric and toxic combined |
Gas
|
Combined aggregate volume of all containers at a workstation shall not exceed an internal container volume of 39.6 gallons or 5.29 cubic feet
|
| Flammable |
15 gallonsa, b
|
|
|
5 poundsa, b
|
||
| Corrosive |
Gas
|
Combined aggregate volume of all containers at a workstation shall not exceed an internal container volume of 39.6 gallons or 5.29 cubic feet
|
|
Use-Open System: 25 gallonsb
|
||
|
Use-Closed System: 150 gallonsb, e
|
||
|
20 poundsa, b
|
||
| Highly toxic |
15 gallonsa
|
|
|
5 poundsa
|
||
| Oxidizer |
Gas
|
Combined aggregate volume of all containers at a workstation shall not exceed an internal container volume of 39.6 gallons or 5.29 cubic feet
|
|
Use-open system: 12 gallonsb
|
||
|
Use-closed system: 60 gallonsb
|
||
|
20 poundsa, b
|
||
| Pyrophoric |
1/2 gallonc, f
|
|
|
See FC Table 2704.2.2.1
|
||
| Toxic |
Use-open system: 15 gallonsb
|
|
|
Use-closed system: 60 gallonsb
|
||
|
5 poundsa, b
|
||
| Unstable reactive Class 3 |
1/2 gallona, b
|
|
|
5 poundsa, b
|
||
| Water-reactive Class 3 |
1/2 gallonc, f
|
|
|
See FC Table 2704.2.2.1
|
- Maximum allowable quantities may be increased 100 percent for closed systems operations. When Note b applies, the quantities increased may be as set forth in both notes.
- Quantities may be increased 100 percent when workstations are internally protected throughout by a fire extinguishing system complying with the requirements of FC Chapter 9. When Note a applies, the quantities increased may be as set forth in both notes. When Note e applies, the maximum increase authorized by both Notes b and e shall not exceed 100 percent.
- Allowed only in workstations that are internally protected throughout by a fire extinguishing system compatible with the reactivity of materials in use at the workstation.
- The quantity limits apply only to materials classified as HPM.
- Quantities may be increased 100 percent for nonflammable, noncombustible corrosive liquids when the materials of construction for workstations are listed or approved for use without internal fire extinguishing system protection. When Note b applies, the maximum increase authorized by both Notes b and e shall not exceed 100 percent.
- A maximum quantity of 5.3 gallons shall be allowed at a workstation when in accordance with FC2705.2.3.4.
Workstations in fabrication areas shall be constructed of materials compatible with the materials stored and used at the workstation. The portion of the workstation that serves as a cabinet for HPM gases and flammable liquids shall be noncombustible and, if of metal, shall not be less than 0.0478-inch (1.2-mm) (18 gauge) steel.
Vessels containing hazardous materials located in or connected to a workstation shall be protected as follows:
- HPM: Vessels containing HPM shall be protected from physical damage and shall not project from the workstation.
- Hazardous cryogenic fluids, gases and liquids: Hazardous cryogenic fluids, gases and liquid vessels located within a workstation shall be protected from seismic forces in an approved manner in accordance with the construction codes, including the Building Code.
- Compressed gases: Protection for compressed gases shall additionally comply with the requirements of FC5303.3.
- Cryogenic fluids: Protection for cryogenic fluid vessels shall additionally comply with FC5503.5.
Each workstation utilizing HPM liquids shall be provided with all of the following:
- Drainage piping systems connected to a compatible system for disposition of such liquids.
- The work surface provided with a slope or other means for directing spilled materials to the containment or drainage system.
- An approved means of containing or directing spilled or leaked liquids to the drainage system.
Pyrophoric liquids and Class 3 water-reactive liquids in containers of greater than 1/2-gallon (2-L) but not more than 5.3-gallon (20-L) capacity shall be allowed at workstations when located inside cabinets and the following conditions are met:
- Maximum amount per cabinet: The maximum amount per cabinet shall be limited to 5.3 gallons (20 L).
- Cabinet construction: Cabinets shall be constructed in accordance with the following:
- Cabinets shall be constructed of not less than 0.097-inch (2.5-mm) (12 gauge) steel.
- Cabinets shall be allowed to have self-closing limited access ports or noncombustible windows that provide access to equipment controls.
- Cabinets shall be provided with self- or manual-closing doors. Manual-closing doors shall be equipped with a door switch that will initiate local audible and visual alarms when the door is in the open position.
- Cabinet exhaust ventilation system: An exhaust ventilation system shall be provided for cabinets and shall comply with the following:
- The system shall be designed to operate at a negative pressure in relation to the surrounding area.
- The system shall be equipped with a pressure monitor and a flow switch alarm monitored at the on-site emergency control station.
- Cabinet spill containment: Spill containment shall be provided in each cabinet, with the spill containment capable of holding the contents of the aggregate amount of liquids in containers in each cabinet.
- Valves: Valves in supply piping between the product containers in the cabinet and the workstation served by the containers shall fail in the closed position upon power failure, loss of exhaust ventilation and upon actuation of the fire control system.
- Fire detection system: Each cabinet shall be equipped with an automatic fire detection system complying with the following conditions:
- Automatic detection system: UV/IR, high-sensitivity smoke detection (HSSD) or other approved detection systems shall be provided inside each cabinet.
- Automatic shutoff: Activation of the detection system shall automatically close the shutoff valves at the source on the liquid supply.
- Alarms and signals: Activation of the detection system shall initiate a local alarm within the fabrication area and transmit a signal to the emergency control station. The alarms and signals shall be both visual and audible.
Hazardous materials shall not be used in service corridors.
The handling of hazardous materials shall comply with the requirements of this section and other applicable provisions of this code.
Exit access corridors and exit enclosures shall not contain HPM except as allowed for exit access corridors by the construction codes, including the Building Code.
A service corridor shall be provided where it is necessary to move HPM during handling from a liquid storage room, HPM room, gas room or from the outdoors to the perimeter wall of a fabrication area. Service corridors shall be designed and constructed in accordance with the construction codes, including the Building Code.
Carts and hand trucks used to move HPM during handling in exit access corridors and exit enclosures shall comply with the requirements of FC5003.10.3.
Carts and hand trucks shall be marked to indicate the contents.