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4126.96.36.199 Purge Gases
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Purging of piping and controls located in gas cabinets or exhausted enclosures shall only be performed using a dedicated inert gas supply that is designed to prevent silane from entering the inert gas supply. The use of nondedicated systems or portions of piping systems is allowed on portions of the venting system that are continuously vented to atmosphere. Devices that could interrupt the continuous flow of purge gas to the atmosphere shall be prohibited.
Exception: Manufacturing and filling facilities where silane is produced or mixed.