4106.4 Indoor Use and Dispensing

The indoor use and dispensing of silane gas and gas mixtures with a silane concentration of 2 percent or more by volume, in amounts exceeding the maximum allowable quantity per control area indicated in Table 2703.1.1(1) shall be in accordance with Sections 4105 and this section.

When provided, exhausted enclosures and gas cabinets shall be installed in accordance with Section 4106.2.2.

A remotely located, manually activated shutdown control shall be provided outside each gas cabinet.

The ventilation system shall be provided with an approved automatic emergency power source in accordance with Section 604 and designed to operate at full capacity.

Automated purge panels shall be provided.

Purging of piping and controls located in gas cabinets or exhausted enclosures shall only be performed using a dedicated inert gas supply that is designed to prevent silane from entering the inert gas supply. The use of nondedicated systems or portions of piping systems is allowed on portions of the venting system that are continuously vented to atmosphere. Devices that could interrupt the continuous flow of purge gas to the atmosphere shall be prohibited.

Gas vent headers or individual purge panel vent lines shall have a continuous flow of inert gas. The inert gas shall be introduced upstream of the first vent or exhaust connection to the header.

Purging operations shall be performed by means ensuring complete purging of the piping and control system before the system is opened to the atmosphere.