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Section 2703 General Safety Provisions
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An emergency control station shall be provided in accordance with Sections 2703.1.1 through 2703.1.3.
The emergency control station shall be located on the premises at an approved location outside the fabrication area.
Trained personnel shall continuously staff the emergency control station.
The emergency control station shall receive signals from emergency equipment and alarm and detection systems. Such emergency equipment and alarm and detection systems shall include, but not be limited to, the following where such equipment or systems are required to be provided either in this chapter or elsewhere in this code:
- Automatic sprinkler system alarm and monitoring systems.
- Manual fire alarm systems.
- Emergency alarm systems.
- Continuous gas detection systems.
- Smoke detection systems.
- Emergency power system.
- Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by Section 2705.2.3.4.
- Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by Section 2705.2.3.4.
Systems, equipment and processes shall include, but not be limited to, containers, cylinders, tanks, piping, tubing, valves and fittings.
In addition to the requirements in Section 2703.2, systems, equipment and processes shall also comply with Section 5003.2, other applicable provisions of this code, the International Building Code and the International Mechanical Code.
In addition to the requirements in Section 2703.2, HPM supply piping and tubing for HPM gases and liquids shall comply with this section.
The requirements set forth in Section 5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids.
Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilation enclosure if the material is a gas, or an approved method of drainage or containment provided for connections if the material is a liquid.
Construction of semiconductor fabrication facilities shall be in accordance with Sections 2703.3.1 through 2703.3.9.
Construction and location of fabrication areas shall comply with the International Building Code.
Pass-throughs in exit access corridors shall be constructed in accordance with the International Building Code.
HPM rooms shall comply with the International Building Code.
Gas cabinets shall comply with Section 5003.8.6.
Exhausted enclosures shall comply with Section 5003.8.5.
Gas rooms shall comply with Section 5003.8.4.
Cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids in containers or in amounts greater than 1/2 gallon (2 L) shall comply with Section 2705.2.3.4.
An emergency plan shall be established as set forth in Section 403.7.1.
Maintenance of equipment, machinery and processes shall comply with Section 5003.2.6.
Areas shall be secured in accordance with Section 5003.9.2.
Electrical wiring and equipment in HPM facilities shall comply with Sections 2703.7.1 through 2703.7.3.
Electrical wiring and equipment in fabrication areas shall comply with NFPA 70.
Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with NFPA 70 for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with Section 2703.14.
Exception: Class I, Division 2 hazardous electrical equipment is not required where the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
Exception: Class I, Division 2 hazardous electrical equipment is not required where the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
Electrical wiring and equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with NFPA 70.
An approved automatic sprinkler system shall be provided in accordance with Sections 2703.10.1 through 2703.10.5 and Chapter 9.
The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment.
A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be located not more than 2 feet (610 mm) from the point of the duct connection or the connection to the plenum. Where necessary to prevent corrosion, the sprinkler head and connecting piping in the duct shall be coated with approved or listed corrosion-resistant materials. The sprinkler head shall be accessible for periodic inspection.
Exceptions:
Exceptions:
- Approved alternative automatic fire-extinguishing systems are allowed. Activation of such systems shall deactivate the related processing equipment.
- Process equipment that operates at temperatures exceeding 932°F (500°C) and is provided with automatic shutdown capabilities for hazardous materials.
- Exhaust ducts 10 inches (254 mm) or less in diameter from flammable gas storage cabinets that are part of a workstation.
- Ducts listed or approved for use without internal automatic sprinkler protection.
Where the horizontal surface of a combustible tool is obstructed from ceiling sprinkler discharge, automatic sprinkler protection that covers the horizontal surface of the tool shall be provided.
Exceptions:
Exceptions:
- An automatic gaseous fire-extinguishing local surface application system shall be allowed as an alternative to sprinklers. Gaseous-extinguishing systems shall be actuated by infrared (IR) or ultraviolet/infrared (UV/IR) optical detectors.
- Tools constructed of materials that are listed as Class 1 or Class 2 in accordance with UL 2360 or approved for use without internal fire-extinguishing system protection.
An approved automatic sprinkler system shall be provided in gas cabinets and exhausted enclosures containing HPM compressed gases.
Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.
Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.
Pass-throughs in existing exit access corridors shall be protected by an approved automatic sprinkler system.
An approved automatic sprinkler system shall be provided in exhaust ducts conveying gases, vapors, fumes, mists or dusts generated from HPM in accordance with this section and the International Mechanical Code.
An approved automatic sprinkler system shall be provided in metallic and noncombustible nonmetallic exhaust ducts where all of the following conditions apply:
- Where the largest cross-sectional diameter is equal to or greater than 10 inches (254 mm).
- The ducts are within the building.
- The ducts are conveying flammable gases, vapors or fumes.
An approved automatic sprinkler system shall be provided in combustible nonmetallic exhaust ducts where the largest cross-sectional diameter of the duct is equal to or greater than 10 inches (254 mm).
Exceptions:
Exceptions:
- Ducts listed or approved for applications without automatic sprinkler system protection.
- Ducts not more than 12 feet (3658 mm) in length installed below ceiling level.
Automatic fire-extinguishing system protection for exhaust connections and plenums of combustible workstations shall comply with Section 2703.10.1.1.
Automatic sprinklers installed in exhaust duct systems shall be hydraulically designed to provide 0.5 gallons per minute (gpm) (1.9 L/min) over an area derived by multiplying the distance between the sprinklers in a horizontal duct by the width of the duct. Minimum discharge shall be 20 gpm (76 L/min) per sprinkler from the five hydraulically most remote sprinklers.
A separate indicating control valve shall be provided for sprinklers installed in exhaust ducts.
Drainage shall be provided to remove sprinkler water discharged in exhaust ducts.
Where corrosive atmospheres exist, exhaust duct sprinklers and pipe fittings shall be manufactured of corrosion-resistant materials or coated with approved materials.
Sprinklers in exhaust ducts shall be accessible for periodic inspection and maintenance.
Automatic sprinkler systems shall be electrically supervised and provided with alarms in accordance with Chapter 9. Automatic sprinkler system alarm and supervisory signals shall be transmitted to the emergency control station.
A manual fire alarm system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with Section 907.
Emergency alarm systems shall be provided in accordance with Sections 2703.12.1 through 2703.12.3, Section 5004.9 and Section 5005.4.4. The maximum allowable quantity per control area provisions of Section 5004.1 shall not apply to emergency alarm systems required for HPM.
Emergency alarm systems shall be provided in the areas indicated in Sections 2703.12.1.1 through 2703.12.1.3.
An approved emergency alarm system shall be provided in service corridors, with not less than one alarm device in the service corridor.
Emergency alarms for corridors, interior exit stairways and ramps and exit passageways shall comply with Section 5005.4.4.
Emergency alarms for liquid storage rooms, HPM rooms and gas rooms shall comply with Section 5004.9.
An approved emergency telephone system, local alarm manual pull stations, or other approved alarm-initiating devices are allowed to be used as emergency alarm-initiating devices.
Activation of the emergency alarm system shall sound a local alarm and transmit a signal to the emergency control station.
A continuous gas detection system shall be provided for HPM gases where the physiological warning threshold level of the gas is at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with Sections 2703.13.1 through 2703.13.2.2.
A continuous gas detection system shall be provided in the areas identified in Sections 2703.13.1.1 through 2703.13.1.4.
A continuous gas detection system shall be provided in fabrication areas where gas is used in the fabrication area.
A continuous gas detection system shall be provided in HPM rooms where gas is used in the room.
A continuous gas detection system shall be provided in gas cabinets and exhausted enclosures. A continuous gas detection system shall be provided in gas rooms where gases are not located in gas cabinets or exhausted enclosures.
Where gases are transported in piping placed within the space defined by the walls of a corridor and the floor or roof above the corridor, a continuous gas detection system shall be provided where piping is located and in the corridor.
Exception: A continuous gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.
Exception: A continuous gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.
The continuous gas detection system shall be capable of monitoring the room, area or equipment in which the gas is located at or below all the following gas concentrations:
- Immediately dangerous to life and health (IDLH) values where the monitoring point is within an exhausted enclosure, ventilated enclosure or gas cabinet.
- Permissible exposure limit (PEL) levels where the monitoring point is in an area outside an exhausted enclosure, ventilated enclosure or gas cabinet.
- For flammable gases, the monitoring detection threshold level shall be vapor concentrations in excess of 25 percent of the lower flammable limit (LFL) where the monitoring is within or outside an exhausted enclosure, ventilated enclosure or gas cabinet.
- Except as noted in this section, monitoring for highly toxic and toxic gases shall also comply with Chapter 60.
The gas detection system shall initiate a local alarm and transmit a signal to the emergency control station when a short-term hazard condition is detected. The alarm shall be both visible and audible and shall provide warning both inside and outside the area where the gas is detected. The audible alarm shall be distinct from all other alarms.
The gas detection system shall automatically close the shutoff valve at the source on gas supply piping and tubing related to the system being monitored for which gas is detected when a short-term hazard condition is detected. Automatic closure of shutoff valves shall comply with the following:
- Where the gas-detection sampling point initiating the gas detection system alarm is within a gas cabinet or exhausted enclosure, the shutoff valve in the gas cabinet or exhausted enclosure for the specific gas detected shall automatically close.
- Where the gas-detection sampling point initiating the gas detection system alarm is within a room and compressed gas containers are not in gas cabinets or exhausted enclosure, the shutoff valves on all gas lines for the specific gas detected shall automatically close.
- Where the gas-detection sampling point initiating the gas detection system alarm is within a piping distribution manifold enclosure, the shutoff valve supplying the manifold for the compressed gas container of the specific gas detected shall automatically close.
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