• Codes
  • Features

    Features Overview

    Go to features
    Reference

    Reference.

    A reliable and up-to-date source of codes.
    Research

    Research.

    Rapidly and efficiently calculate project parameters.
    Collaboration

    Collaboration.

    Get everyone on the same page and streamline code research.
    Workflows
    Architects General Contractor Building Official & Plans Examiner Inspectors Owner Subcontractors Code Consultants
  • Pricing
  • Login
  • Sign Up
Sign Up
Login
  • Code Library
  • Features
  • Pricing
  • About
  • Careers
  • Help
  • Contact
  • Terms
  • Privacy
Sign Up
Upgrade to Premium
Code calculators: Code Calculators automatically generates a detailed list of requirements.
REFERENCE
Amendment Styling
Industry-leading search
Suggested code sections
Code diagrams
RESEARCH
Code calculators
Filter by topic
Code compare
Code sheet exports
COLLABORATION
Team projects
Bookmarks
Comments
START 2 WEEK FREE TRIAL
Have an account? Sign in
// CODE SNIPPET

Section 2703 General Safety Provisions

Fire Code 2015 of New York State > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions
JUMP TO FULL CODE CHAPTER

2703.1 Emergency Control Station

An emergency control station shall be provided in accordance with Sections 2703.1.1 through 2703.1.3.

2703.1.1 Location

The emergency control station shall be located on the premises at an approved location outside the fabrication area.

2703.1.2 Staffing

Trained personnel shall continuously staff the emergency control station.

2703.1.3 Signals

The emergency control station shall receive signals from emergency equipment and alarm and detection systems. Such emergency equipment and alarm and detection systems shall include, but not be limited to, the following where such equipment or systems are required to be provided either in this chapter or elsewhere in this code:
  1. Automatic sprinkler system alarm and monitoring systems.
  2. Manual fire alarm systems.
  3. Emergency alarm systems.
  4. Continuous gas detection systems.
  5. Smoke detection systems.
  6. Emergency power system.
  7. Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by Section 2705.2.3.4.
  8. Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by Section 2705.2.3.4.

2703.2 Systems, Equipment and Processes

Systems, equipment and processes shall be in accordance with Sections 2703.2.1 through 2703.2.3.2.

2703.2.1 Application

Systems, equipment and processes shall include, but not be limited to, containers, cylinders, tanks, piping, tubing, valves and fittings.

2703.2.2 General Requirements

In addition to the requirements in Section 2703.2, systems, equipment and processes shall also comply with Section 5003.2, other applicable provisions of this code, the International Building Code and the International Mechanical Code.

2703.2.3 Additional Requirements for HPM Supply Piping

In addition to the requirements in Section 2703.2, HPM supply piping and tubing for HPM gases and liquids shall comply with this section.

2703.2.3.1 General Requirements

The requirements set forth in Section 5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids.

2703.2.3.2 Health-Hazard Ranking 3 or 4 HPM

Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilation enclosure if the material is a gas, or an approved method of drainage or containment provided for connections if the material is a liquid.

2703.3 Construction Requirements

Construction of semiconductor fabrication facilities shall be in accordance with Sections 2703.3.1 through 2703.3.9.

2703.3.1 Fabrication Areas

Construction and location of fabrication areas shall comply with the International Building Code.

2703.3.2 Pass-Throughs in Exit Access Corridors

Pass-throughs in exit access corridors shall be constructed in accordance with the International Building Code.

2703.3.3 Liquid Storage Rooms

Liquid storage rooms shall comply with Chapter 57 and the International Building Code.

2703.3.4 HPM Rooms

HPM rooms shall comply with the International Building Code.

2703.3.5 Gas Cabinets

Gas cabinets shall comply with Section 5003.8.6.

2703.3.6 Exhausted Enclosures

Exhausted enclosures shall comply with Section 5003.8.5.

2703.3.7 Gas Rooms

Gas rooms shall comply with Section 5003.8.4.

2703.3.8 Service Corridors

Service corridors shall comply with Section 2705.3 and the International Building Code.

2703.3.9 Cabinets Containing Pyrophoric Liquids or Water-Reactive Class 3 Liquids

Cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids in containers or in amounts greater than 1/2 gallon (2 L) shall comply with Section 2705.2.3.4.

2703.4 Emergency Plan

An emergency plan shall be established as set forth in Section 403.7.1.

2703.5 Maintenance of Equipment, Machinery and Processes

Maintenance of equipment, machinery and processes shall comply with Section 5003.2.6.

2703.6 Security of Areas

Areas shall be secured in accordance with Section 5003.9.2.

2703.7 Electrical Wiring and Equipment

Electrical wiring and equipment in HPM facilities shall comply with Sections 2703.7.1 through 2703.7.3.

2703.7.1 Fabrication Areas

Electrical wiring and equipment in fabrication areas shall comply with NFPA 70.

2703.7.2 Workstations

Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with NFPA 70 for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with Section 2703.14.

Exception: Class I, Division 2 hazardous electrical equipment is not required where the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.

2703.7.3 Hazardous Production Material (HPM) Rooms, Gas Rooms and Liquid Storage Rooms

Electrical wiring and equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with NFPA 70.

2703.8 Corridors and Enclosures for Stairways and Ramps

Hazardous materials shall not be used or stored in corridors or enclosures for stairways and ramps.

2703.9 Service Corridors

Hazardous materials shall not be used in an open-system use condition in service corridors.

2703.10 Automatic Sprinkler System

An approved automatic sprinkler system shall be provided in accordance with Sections 2703.10.1 through 2703.10.5 and Chapter 9.

2703.10.1 Workstations and Tools

The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment.

2703.10.1.1 Combustible Workstations

A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be located not more than 2 feet (610 mm) from the point of the duct connection or the connection to the plenum. Where necessary to prevent corrosion, the sprinkler head and connecting piping in the duct shall be coated with approved or listed corrosion-resistant materials. The sprinkler head shall be accessible for periodic inspection.

Exceptions:
  1. Approved alternative automatic fire-extinguishing systems are allowed. Activation of such systems shall deactivate the related processing equipment.
  2. Process equipment that operates at temperatures exceeding 932°F (500°C) and is provided with automatic shutdown capabilities for hazardous materials.
  3. Exhaust ducts 10 inches (254 mm) or less in diameter from flammable gas storage cabinets that are part of a workstation.
  4. Ducts listed or approved for use without internal automatic sprinkler protection.

2703.10.1.2 Combustible Tools

Where the horizontal surface of a combustible tool is obstructed from ceiling sprinkler discharge, automatic sprinkler protection that covers the horizontal surface of the tool shall be provided.

Exceptions:
  1. An automatic gaseous fire-extinguishing local surface application system shall be allowed as an alternative to sprinklers. Gaseous-extinguishing systems shall be actuated by infrared (IR) or ultraviolet/infrared (UV/IR) optical detectors.
  2. Tools constructed of materials that are listed as Class 1 or Class 2 in accordance with UL 2360 or approved for use without internal fire-extinguishing system protection.

2703.10.2 Gas Cabinets and Exhausted Enclosures

An approved automatic sprinkler system shall be provided in gas cabinets and exhausted enclosures containing HPM compressed gases.

Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.

2703.10.3 Pass-Throughs in Existing Exit Access Corridors

Pass-throughs in existing exit access corridors shall be protected by an approved automatic sprinkler system.

2703.10.4 Exhaust Ducts for HPM

An approved automatic sprinkler system shall be provided in exhaust ducts conveying gases, vapors, fumes, mists or dusts generated from HPM in accordance with this section and the International Mechanical Code.

2703.10.4.1 Metallic and Noncombustible Nonmetallic Exhaust Ducts

An approved automatic sprinkler system shall be provided in metallic and noncombustible nonmetallic exhaust ducts where all of the following conditions apply:
  1. Where the largest cross-sectional diameter is equal to or greater than 10 inches (254 mm).
  2. The ducts are within the building.
  3. The ducts are conveying flammable gases, vapors or fumes.

2703.10.4.2 Combustible Nonmetallic Exhaust Ducts

An approved automatic sprinkler system shall be provided in combustible nonmetallic exhaust ducts where the largest cross-sectional diameter of the duct is equal to or greater than 10 inches (254 mm).

Exceptions:
  1. Ducts listed or approved for applications without automatic sprinkler system protection.
  2. Ducts not more than 12 feet (3658 mm) in length installed below ceiling level.

2703.10.4.3 Exhaust Connections and Plenums of Combustible Workstations

Automatic fire-extinguishing system protection for exhaust connections and plenums of combustible workstations shall comply with Section 2703.10.1.1.

2703.10.4.4 Exhaust Duct Sprinkler System Requirements

Automatic sprinklers installed in exhaust duct systems shall be hydraulically designed to provide 0.5 gallons per minute (gpm) (1.9 L/min) over an area derived by multiplying the distance between the sprinklers in a horizontal duct by the width of the duct. Minimum discharge shall be 20 gpm (76 L/min) per sprinkler from the five hydraulically most remote sprinklers.

2703.10.4.4.1 Sprinkler Head Locations

Automatic sprinklers shall be installed at 12-foot (3658 mm) intervals in horizontal ducts and at changes in direction. In vertical runs, automatic sprinklers shall be installed at the top and at alternate floor levels.

2703.10.4.4.2 Control Valve

A separate indicating control valve shall be provided for sprinklers installed in exhaust ducts.

2703.10.4.4.3 Drainage

Drainage shall be provided to remove sprinkler water discharged in exhaust ducts.

2703.10.4.4.4 Corrosive Atmospheres

Where corrosive atmospheres exist, exhaust duct sprinklers and pipe fittings shall be manufactured of corrosion-resistant materials or coated with approved materials.

2703.10.4.4.5 Maintenance and Inspection

Sprinklers in exhaust ducts shall be accessible for periodic inspection and maintenance.

2703.10.5 Sprinkler Alarms and Supervision

Automatic sprinkler systems shall be electrically supervised and provided with alarms in accordance with Chapter 9. Automatic sprinkler system alarm and supervisory signals shall be transmitted to the emergency control station.

2703.11 Manual Fire Alarm System

A manual fire alarm system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with Section 907.

2703.12 Emergency Alarm System

Emergency alarm systems shall be provided in accordance with Sections 2703.12.1 through 2703.12.3, Section 5004.9 and Section 5005.4.4. The maximum allowable quantity per control area provisions of Section 5004.1 shall not apply to emergency alarm systems required for HPM.

2703.12.1 Where Required

Emergency alarm systems shall be provided in the areas indicated in Sections 2703.12.1.1 through 2703.12.1.3.

2703.12.1.1 Service Corridors

An approved emergency alarm system shall be provided in service corridors, with not less than one alarm device in the service corridor.

2703.12.1.2 Corridors and Interior Exit Stairways and Ramps

Emergency alarms for corridors, interior exit stairways and ramps and exit passageways shall comply with Section 5005.4.4.

2703.12.1.3 Liquid Storage Rooms, HPM Rooms and Gas Rooms

Emergency alarms for liquid storage rooms, HPM rooms and gas rooms shall comply with Section 5004.9.

2703.12.2 Alarm-Initiating Devices

An approved emergency telephone system, local alarm manual pull stations, or other approved alarm-initiating devices are allowed to be used as emergency alarm-initiating devices.

2703.12.3 Alarm Signals

Activation of the emergency alarm system shall sound a local alarm and transmit a signal to the emergency control station.

2703.13 Continuous Gas Detection Systems

A continuous gas detection system shall be provided for HPM gases where the physiological warning threshold level of the gas is at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with Sections 2703.13.1 through 2703.13.2.2.

2703.13.1 Where Required

A continuous gas detection system shall be provided in the areas identified in Sections 2703.13.1.1 through 2703.13.1.4.

2703.13.1.1 Fabrication Areas

A continuous gas detection system shall be provided in fabrication areas where gas is used in the fabrication area.

2703.13.1.2 HPM Rooms

A continuous gas detection system shall be provided in HPM rooms where gas is used in the room.

2703.13.1.3 Gas Cabinets, Exhausted Enclosures and Gas Rooms

A continuous gas detection system shall be provided in gas cabinets and exhausted enclosures. A continuous gas detection system shall be provided in gas rooms where gases are not located in gas cabinets or exhausted enclosures.

2703.13.1.4 Corridors

Where gases are transported in piping placed within the space defined by the walls of a corridor and the floor or roof above the corridor, a continuous gas detection system shall be provided where piping is located and in the corridor.

Exception: A continuous gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.

2703.13.2 Gas Detection System Operation

The continuous gas detection system shall be capable of monitoring the room, area or equipment in which the gas is located at or below all the following gas concentrations:
  1. Immediately dangerous to life and health (IDLH) values where the monitoring point is within an exhausted enclosure, ventilated enclosure or gas cabinet.
  2. Permissible exposure limit (PEL) levels where the monitoring point is in an area outside an exhausted enclosure, ventilated enclosure or gas cabinet.
  3. For flammable gases, the monitoring detection threshold level shall be vapor concentrations in excess of 25 percent of the lower flammable limit (LFL) where the monitoring is within or outside an exhausted enclosure, ventilated enclosure or gas cabinet.
  4. Except as noted in this section, monitoring for highly toxic and toxic gases shall also comply with Chapter 60.

2703.13.2.1 Alarms

The gas detection system shall initiate a local alarm and transmit a signal to the emergency control station when a short-term hazard condition is detected. The alarm shall be both visible and audible and shall provide warning both inside and outside the area where the gas is detected. The audible alarm shall be distinct from all other alarms.

2703.13.2.2 Shut Off of Gas Supply

The gas detection system shall automatically close the shutoff valve at the source on gas supply piping and tubing related to the system being monitored for which gas is detected when a short-term hazard condition is detected. Automatic closure of shutoff valves shall comply with the following:
  1. Where the gas-detection sampling point initiating the gas detection system alarm is within a gas cabinet or exhausted enclosure, the shutoff valve in the gas cabinet or exhausted enclosure for the specific gas detected shall automatically close.
  2. Where the gas-detection sampling point initiating the gas detection system alarm is within a room and compressed gas containers are not in gas cabinets or exhausted enclosure, the shutoff valves on all gas lines for the specific gas detected shall automatically close.
  3. Where the gas-detection sampling point initiating the gas detection system alarm is within a piping distribution manifold enclosure, the shutoff valve supplying the manifold for the compressed gas container of the specific gas detected shall automatically close.
Exception: Where the gas-detection sampling point initiating the gas detection system alarm is at the use location or within a gas valve enclosure of a branch line downstream of a piping distribution manifold, the shutoff valve for the branch line located in the piping distribution manifold enclosure shall automatically close.
SEE MORE

Related Code Sections


Section 1803 Semiconductor Fabrication Facilities, General Safety Provisions
provisions of this code, the Building Code of New York State and the Mechanical Code of New York State ...
2010 Fire Code of NY > 18 Semiconductor Fabrication Facilities > 1803 General Safety Provisions
Section 2703 Semiconductor Fabrication Facilities, General Safety Provisions
provisions of this code, the Building Code of New York State and the Mechanical Code of New York State ...
2020 Fire Code of NYS > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions
Section 2703 Semiconductor Fabrication Facilities, General Safety Provisions
applicable provisions of this code, the International Building Code and the International Mechanical Code ...
Fire Code 2015 of New York State > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions
Section 3803 Higher Education Laboratories, General Safety Provisions
Laboratories and laboratory suites applying the requirements of this chapter shall be in accordance with the general safety provisions in Sections ...
2020 Fire Code of NYS > 38 Higher Education Laboratories > 3803 General Safety Provisions
1803.14 Semiconductor Fabrication Facilities, Exhaust Ventilation Systems for HPM
, other applicable provisions of this code, the Building Code of New York State and the Mechanical Code of New York State ...
2010 Fire Code of NY > 18 Semiconductor Fabrication Facilities > 1803 General Safety Provisions > 1803.14 Exhaust Ventilation Systems for HPM
Help Contact Us Privacy Terms
Code diagrams
Code diagrams
Unpack the code through illustrations and descriptions.
Code Calculators
Code Calculators
Code calculators automatically generate a detailed list of requirements.
View thousands of relevant UL Certified products and assemblies that help achieve code compliance
View thousands of relevant UL Certified products and assemblies that help achieve code compliance
Access to UL product and system certification information.
Search
Search
Don't miss relevant code. Quickly locate sections across your jurisdiction.
Shared projects
Shared projects
Projects provide a dedicated space to collaborate on code research.
Code Compare
Code Compare
Highlight differences between any two building codes.
Code sheet exports
Code sheet exports
Generate a code sheet that integrates with your drawing set.
UpCodes Premium
Leverage the most sophisticated code compliance platform.
TRY FREE FOR TWO WEEKS VISIT PRICING
Join the waitlist
We are looking to gauge the level of interest in linking UL product and system certification information alongside related code sections.

Let us know your email and we’ll ping you once it’s ready! Learn more.

Thank you for your interest!

If you’re open to it, we would love to jump on the phone to make sure we’re building this in the best way possible for your workflow. Any insight or advice would be greatly appreciated. We’ve sent you an email with a calendar link to book at time with us.


Cancel
Get Early Access
UpCodes Premium
Leverage the full code compliance platform.
START 2 WEEK FREE TRIAL LEARN MORE