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// CODE SNIPPET

2703.14 Exhaust Ventilation Systems for HPM

Fire Code 2015 of New York State > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions > 2703.14 Exhaust Ventilation Systems for HPM
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Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 2703.14.1 through 2703.14.3, other applicable provisions of this code, the International Building Code and the International Mechanical Code.

2703.14.1 Where Required

Exhaust ventilation systems shall be provided in the following locations in accordance with the requirements of this section and the International Building Code:
  1. Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the International Building Code. The fire code official is authorized to require additional manual control switches.
  2. Workstations: A ventilation system shall be provided to capture and exhaust gases, fumes and vapors at workstations.
  3. Liquid storage rooms: Exhaust ventilation for liquid storage rooms shall comply with Section 5004.3.1 and the International Building Code.
  4. HPM rooms: Exhaust ventilation for HPM rooms shall comply with Section 5004.3.1 and the International Building Code.
  5. Gas cabinets: Exhaust ventilation for gas cabinets shall comply with Section 5003.8.6.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall also comply with Chapter 60.
  6. Exhausted enclosures: Exhaust ventilation for exhausted enclosures shall comply with Section 5003.8.5.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall also comply with Chapter 60.
  7. Gas rooms: Exhaust ventilation for gas rooms shall comply with Section 5003.8.4.2. Exhaust ventilation for gas rooms containing highly toxic or toxic gases shall also comply with Chapter 60.
  8. Cabinets containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust ventilation for cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids shall be as required in Section 2705.2.3.4.

2703.14.2 Penetrations

Exhaust ducts penetrating fire barriers constructed in accordance with Section 707 of the International Building Code or horizontal assemblies constructed in accordance with Section 711 of the International Building Code shall be contained in a shaft of equivalent fire-resistance-rated construction. Exhaust ducts shall not penetrate fire walls. Fire dampers shall not be installed in exhaust ducts.

2703.14.3 Treatment Systems

Treatment systems for highly toxic and toxic gases shall comply with Chapter 60.

Related Code Sections


1803.14 Semiconductor Fabrication Facilities, Exhaust Ventilation Systems for HPM
Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 1803.14.1 through 1803.14.3 ...
2010 Fire Code of NY > 18 Semiconductor Fabrication Facilities > 1803 General Safety Provisions > 1803.14 Exhaust Ventilation Systems for HPM
2703.14 Semiconductor Fabrication Facilities, Exhaust Ventilation Systems for HPM
Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 2703.14.1 through 2703.14.3 ...
Fire Code 2015 of New York State > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions > 2703.14 Exhaust Ventilation Systems for HPM
2703.14 Semiconductor Fabrication Facilities, Exhaust Ventilation Systems for HPM
Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 2703.14.1 through 2703.14.3 ...
2020 Fire Code of NYS > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions > 2703.14 Exhaust Ventilation Systems for HPM
2703.14.3 Semiconductor Fabrication Facilities, Treatment Systems
Treatment systems for highly toxic and toxic gases shall comply with Chapter 60 ...
2020 Fire Code of NYS > 27 Semiconductor Fabrication Facilities > 2703 General Safety Provisions > 2703.14 Exhaust Ventilation Systems for HPM > 2703.14.3 Treatment Systems
1803.14.2 Semiconductor Fabrication Facilities, Penetrations
Exhaust ducts penetrating fire barrier assemblies shall be contained in a shaft of equivalent fire-resistance-rated construction. Exhaust ducts shall ...
2010 Fire Code of NY > 18 Semiconductor Fabrication Facilities > 1803 General Safety Provisions > 1803.14 Exhaust Ventilation Systems for HPM > 1803.14.2 Penetrations
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